Fast, Consistent Solenoid for Atomic Layer Deposition

TLX developed a two-position, three-way pilot valve with performance tailored for ALD applications, including ultra-fast response, high operating temperature and compact design.

Customer Problem

Atomic layer deposition (ALD) films are applied in uniform, thin layers with atomic-level, repeatable control and complete conformity. A pulse of inert gas separates each dose of reactive chemicals, purging the chamber in preparation for the next application. The deposition process required a solution that could operate quickly through the cycles, under maximum pressure and temperature, while maintaining consistency over an extended life (>100 million cycles).

The TLX Solution

The ALD application cycle requires multiple doses of reactive chemicals to be delivered sequentially into the processing chamber. TLX developed a two-position, three-way pilot valve with performance tailored for ALD applications, including ultra-fast response, high operating temperature and compact design. The component used minimal power, making it more cost-effective than competing designs.

View Design Solution

Atomic Layer Deposition Pilot Valve

Operating voltage: 12 to 30 Vdc

Operating pressure range: 0 to 500 kPa

Operating temperature: -40 to 200°C

Operating frequency: 100-300 Hz

Resistance: 48 +/- 4.8 ohms @ 20°C

Inductance: 68.6 mH

Flow Rate: 35 l/min @ 80 kPa

Leak Rate: < 2 cc/min

PWM pressure control: 10-90% duty cycle

PWM vacuum control: 10-90% duty cycle

Response time: < 6 ms

Burst pressure: 50 bar

Vibration: 20 G

All TLX components are customized to fit system requirements, meaning technical specifications are unique to each customer and design. Examples given on our website are for illustration purposes only.

Working with TLX

Experienced partner of industry leaders, first-tier suppliers, and OEMs
Direct access to our design and engineering team
Localized production in USA and China
Dependable single-source solution from design to delivery

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Our Process

Step 1 / Initial Review

Our engineering team works directly with you to determine the viability of your program and identify the best solution based on your specifications.

Step 2 / Quote

Quotes include all costs related to your project - tooling, prototype, piece part, production and project specific costs.

Step 3 / Design Review & Prototypes

Our engineering team reviews the design with you and makes any adjustments needed. Prototypes are built according to design specifications for testing.

Step 4 / Testing

Prototypes are tested according to your specifications, with all relevant test data provided to you for evaluation.

Step 5 / APQP

DFMEA’s, PFMEA’s, control plans and process flow diagrams are started to drive the product intent design.

Step 6 / Pre-Production

Working drawings are developed for production. A second prototype build and a set of production parts are made from tooling and thoroughly tested.

Step 7 / PPAP/Production

The final design along with the PPAP (Production Part Approval Process) is developed and the new product enters production.

Step 8 / Ongoing Improvements

Our team collaborates with you to continue making improvements to the product to best meet your needs, increasing efficiency and reducing cost.

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